A Novel Structure for MEMS Based Varactors
نویسندگان
چکیده
Sensors & Transducers Journal (ISSN 1726-5479) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA). Available in electronic and CD-ROM. Abstract: A novel structure with electro-mechanically tunable capacitor for RF application is presented. The suspended electrodes are designed in such a way that both are electrostaticaly displaceable. This double plate moveability feature of the capacitor increases the tuning range. In this structure, there is no need for cantilever beams, which introduce considerable series resistance to the capacitor and decrease the quality factor. Therefore, our proposed varactor achieves better Q in a smaller area. The simulated one pF capacitor shows a Q of 40 at 1 GHz and a tuning range of 42%. Pull-in voltage is 3.6 V, which is a reasonable value for submicron CMOS technologies.
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